5工艺排气技术规范.docx
- 文档编号:3243580
- 上传时间:2023-05-05
- 格式:DOCX
- 页数:95
- 大小:64.16KB
5工艺排气技术规范.docx
《5工艺排气技术规范.docx》由会员分享,可在线阅读,更多相关《5工艺排气技术规范.docx(95页珍藏版)》请在冰点文库上搜索。
5工艺排气技术规范
中芯国际集成电路制造(上海)有限公司
FAB8厂新建工程
技術規範
(TechnicalSpecification)
第20015章
工艺排气技术规范
TableofContents
1.Statementofwork
Thescopeofworkincludesfollowingsystems
∙Processexhaustairsystemsincl.scrubbers,chemicaldosingsystem,scrubber/ductdrainstothemaindrainsystem,fans,stacksandductwork
∙
∙ElectricalsystemincludingMCC,VFD,UPS/DCBank,cablingetcforExhaustPackage
∙
∙ControlSystemincludingfielddevicesandlocalSCADAforExhaustPackage
∙
Thescopeofworkshallcover
∙Thedetailedengineering(incl.SpacemanagementforFab8)
∙
∙Furnishingofallmaterials,labor,equipment
∙
∙Constructionandinstallation
∙
∙Transportandassembly(incl.seaworthypackaging)
∙
∙Commissioning,testingandacceptance
∙
∙Service
∙
∙Documentation,asbuiltdrawingsandO&M(inChinese)
∙
∙Qualityassuranceandcontrol
∙
∙ContinuousQualityMonitoring
∙
∙Trainingofownerandownerspersonnel
∙
∙Operation(untilhand-overofthecontrol-system)
∙
AdetailedresponsibilitymatrixisgiveninAttachment1.
ThesystemshallsupplyanexhaustpackageintherequiredquantityandqualitytoFab8.
SMICFabnamingconventionisasfollows:
Fab8
Therequiredcapacities,quantitiesandsystemdesignaredefinedinchapterSystemDescription.Theinstallationshallbesuitableforcontinuousoperation100%oftime.
Allupgradesandextensionsofthesystemshallbepossiblewithoutinterruptionordeteriorationofthesystemoperation.
Thequalitymonitoringsystemshallusehighaccuracyon-lineinstrumentation,automateddataacquisition,out-of-tolerancealertingandalarmingandtrending(seechapterElectrical,ControlsandMonitoringfordetails).Thesystemshallincorporatethebestavailableandcost-effectivetechnologyandbecapableofbeingmodifiedwithminimumimpacttomanufacturinglinesasnewequipmentbecomesavailable.
AllSCADAdatashallbemadeavailabletothecentralFMCSsystem,ifrequiredbytheOwner.
Underthetermcompletesystemsisunderstood,i.e.formpartofthescopeworkoftheContractor:
∙Deliveryandinstallationofallrequiredmaterials,components,auxiliaries,fittings,fastenings,supports
∙
∙Alltemporaryprovisionsincl.allmeansandprovisions(temporaryandpermanent)forvertical/horizontaltransportation
∙
∙Alltemporaryprovisions,siteofficesandrequiredutilitiesforstart-upandcertifications
∙
∙Operation,maintenance,monitoringandreportingetc(limitedforperiodfromcommissioningtofinalacceptance)
∙
Contractorshallalsoinstallallinterconnectingpipingbetweenpartsofthesystem.
Constructionmanagementshallformpartofthescopeofthecontractor.Installationshallbedoneinconditionsasperspecificationsofthisbidpackage.TheContractorshallberesponsibleformaintainingcleanconditionandgoodhousekeepingintheareasandallotherrelevantroomsorareas,wheretheContractorpersonnelworks.
Thecontractorshallbeliablefortheoverallperformancesoftheexhaustpackageaspercontract.Thisshallberepeatedafterlayoutchangesandtheresultingchangesinconsumption,ifrequiredbytheOwner,seechapterProjectControlsandDocumentation.
Allprovisions,utilitiesandlabornecessaryforthesafeandreliableinstallation/operationofthetotalexhaustpackage,suchassiteofficesetc.shallbepartofthescopeoftheContractor,evenifnotspecificallymentioned.
2.
Systemdescription
2.
2.1General
2.2
ProcessexhaustisrequiredtoservemanufacturingandsupporttoolswithintheproductionareasofFab8.
Fourseparateexhaustsystemsaretobeinstalled,namelyscrubbed,ammonia,generalandsolvent.Theexhaustsystemsaretobeseparatedbasedupontheareaserved.Fab8willbeservedwithaseparateexhaustsystemfromFab8.Foradetaileddefinitionofsystemcoverageforthisbidpackage,pleaserefertothedesigndrawings.
Thesesystemsaretobedesignedtomaintainalevelofexhaustatthemostremotepointinthedistributionsystem.Restrictedpollutantscontainedwithintheextractedairaretobetreatedpriortobeingdischargedtotheenvironment.ThepollutioncontrolmeasureistobeconsideredforeachexhaustsystemsandistobecompliantwithlocalcodesinadditiontotherequirementsofSMIC.
Tocrossfirezoneswiththeductworktheexhaustsystemvendormustfollowlocalcodes,FM-regulationsandSMICrequirements.
Drainpointsforcondensateshouldbeinstalledinmainductsinsufficientquantityandateverylowpointintheductwork.Allexhaustcondensatedrainsshallbeconnectedtothemainprocessdrainsystem.
AllprocessdrainsaretogetaconnectiontoscrubbedexhaustsystemtoventvaporfumesfromthePDSdrains.
Thesystemsaretocompriseofmainductandsub-mainducts.Apressuredifferentialtransmitterwillbeinstalledatendofthemostremotemainductforeachexhaustsystemformonitoringpurpose.Twopressuredifferentialtransmitters(connectingtoseparateAIcardsfortrueredundancy)willbeinstalledatsuctionheaderforeachexhaustsystem.TheyareusedforcontrollingtheVFDoutput/fanspeed.
Eachsub-mainshallbeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandalockablemanualdamperforairflowcontrol,alsoacappedmeasuringportforairflowspeed/pressure/contentmeasurements.
HangersinthesubfabincludeC-profilesatthewaffleslabandvibrationisolators.Additionalvibration-dampedhangersaretobeinstalledonthesub-mainsinthePhotolithographyArea.
Gratingsateachlevelintheexhaustductshaftbelongtothescopeoftheexhaustsystem,includingremovablemaintenanceopeningonthebottomofthefacetpanelandastepladder.I-beamsupportsattachedtothebuildingsteelstructurefortheexhaustriserductsarepartoftheexhaustsystemscope.
Onepressurerelievedamperwillbeinstalledinthemainheadertopreventtoomuchunderpressureintheductworksystem.Theductshavetobeequippedwithsufficientopeningsformaintenanceofdampersandscrubbersinthemanifoldsetc.
Forductworklayoutandrouting,pleaserefertothedesigndrawings.
Forsafetyreasons150mmC-Profileshavetobeinstalledunderneathmainductsasfall-downprotectionandadditionalsupport(every4.2m).
2.3AcidScrubbedandAmmoniaExhaust
2.4
Theacidscrubbedexhaustsystemisdesignedfortheremovalofaircontainingacidsfromtheprocessequipmentintheproductionarea.Theammoniaexhaustsystemisdesignedfortheremovalofaircontainingammoniafromtheprocessequipmentintheproductionarea.
Independentsystemsshallbeprovidedforscrubbedandammoniaexhaust.Eachsystemshallbeprovidedwithstandbycapacity.
Acid/Ammoniaexhaustsystemscomprisesofthefollowingelements:
∙exhaustfans
∙
∙wetscrubbers
∙
∙distributionductwork
∙
∙mainheadersandmanifolds
∙
∙exhauststacks(FRP)
∙
Thetotalspecifieddesignvolumeofacidcontaminatedairtobeexhaustedisapproximately*****CMH(with*****CMHstandby).Thetotalspecifiedvolumeofammoniacontaminatedairtobeexhaustedisapproximately*****CMH(with*****CMHstandby).
Fiveacidscrubbers/fans(included:
onestandbyscrubber/fan)aretobeinstalledinFab8Level3.Thescrubbersshallbeinstalledtoreducepollutiontolocalauthorityrequirements.Thereisamanifold(mainheader)connectingthescrubbersforeachsystemonthesuctionsideandoneonthedischargeside.
Eachsub-mainistobeequippedwithatestporttoallowmeasurementbyapressure/airspeedtestingprobe(Testo400).Eachsub-mainshallalsobeequippedwithapressureindicatorgaugeforvisualpressurecheckattheendofthesub-mainandamanualdamperforairflowcontrol.
Onepressurerelievedamperwillbeinstalledinthemainheadertoprotecttheductworksystemfromdamageduetotoomuchunderpressure.
ThechemicalsupplysystemswillbeinstalledforthescrubbersonFab8Level3(NaOHforSEXscrubbersandH2SO4forAEXscrubbers).FromtheNaOH/H2SO4storagetanksonFab9Level1(storagetanksandfillingstationsareinthescopeoftheFAB9ProcessExhaustSysteminStage1.Instage2,theNaOHwillcomefromthecommonstoragetankonCUB4Level1andH2SO4willbefromthewasteacidtank.),Thesupplysystemshallincludetwopumpsforeachchemical(magnetic-coupled,plasticlining),doublecontainmentpipingfromcommonchemicalstoragetankstothedailytanks,dailytanksincludingcontrolpanelandallaccessories.Theamountsofthechemicalsusedaretobemonitoredwithvolumeflowmeasuringdevicesandshownontheexhaustsystemcomputermonitor.Thecompleteandfunctionalchemicaldosingsystemsareincludedintheprocessexhaustsystempackage.
Thescrubberblow-downandcondensatedrainswillbeconnectedtomainPDSdrainonFab8Level1(drainspipingincludedinexhaustpackage).ThecondensatedrainsforthemainrisersmustalsobedrainedtodesignatedlocationsonLevel1,thenpumpedtothePDSdrain(SEX)ortheappropriatecollectiontank(AEX).
Theprocessedcleanairwillbedischargedthroughstacks.Theductworksystemincludingstacksmustbeacid/ammonia(chemical)andcorrosionresistant.TheductworkmaterialmustbeFMcertified,ETFE/ECTFE(fluoropolymer)coatedstainlesssteel304.TheductworksysteminFAB8mustbeprovidedwithapneumaticoperatedunderpressureprotectiondamperinstalledonthemainheader,whichcanalsobeusedasby-passdamperformaintenanceandtestingpurpose.Allsub-mainsaretobeequippedwithpressureindicatorsattheendsforvisualpressurecheck.ThescrubbersandstacksaremadeofFRP.Themainheader
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- 工艺 排气 技术规范